High-Work-Function Transparent Conductive Oxides with Multilayer Films

Transparent conductive oxide (TCO) films using WO3/Ag/WO3 (WAW) were fabricated under room temperature conditions. WAW has a low sheet resistance of 12 Ω/sq and a work function of 6.334 eV. This is one of the TCOs with the highest work function. These properties make it useful for application in electroluminescent devices and solar cells. Both theoretical calculation and experimental results show that the two WO3 layers strongly affect transparency, while the Ag layer determines transmittance and electrical performances. These rules can be applied in all dielectric/metal/dielectric structures.