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Titanium dioxide solar cells on top of a wide range of substrates, even flexible plastics, are accessible by chemical vapor deposition (CVD) of TiO2 by resistive heating of Ti3O5 under partial oxygen pressure. Cells using TiO2 in combination with Cu phthalocyanine on ITO substrates (see Figure) are most effective if the TiO2 layer is thin (15 nm), and if a further perylene dye layer is used to tune the wavelength of light absorption.
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Thelakkat et al. (2002) studied this question.
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