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June 14, 2002Journal of Micromechanics and Microengineering

A 32-site neural recording probe fabricated by DRIE of SOI substrates

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Authors

PNP. NorlinKista Photonics Research CenterMKMaria KindlundhKista Photonics Research CenterAMA. MourouxKista Photonics Research Center

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Norlin et al. (2002) studied this question.

synapsesocial.com/papers/6a1bd08a6f692abb725ee94chttps://doi.org/10.1088/0960-1317/12/4/312
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