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TFTs with zinc oxynitride (ZnON) as active layer were developed, and a saturation mobility over 50 cm 2 /Vs was achieved. The ZnON TFTs show superior I‐V performance and Vth uniformity. A 14 inch WOLED panel driven by ZnON TFT was demonstrated. The reliability of ZnON panels was evaluated at high‐temperatureoperation and low‐temperature‐operation conditions, and satisfied results were achieved.
Yan et al. (Mon,) studied this question.
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