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May 1, 1983Journal of Applied Physics

A revised analysis of dry oxidation of silicon

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Authors

AFA. FargeixInstitut polytechnique de GrenobleGGG. GhibaudoON Semiconductor (United States)GKG. KamarinosInstitut polytechnique de Grenoble

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Fargeix et al. (1983) studied this question.

synapsesocial.com/papers/6a27f49bb68a6795bc174f41https://doi.org/10.1063/1.332286
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