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January 15, 1987Journal of Applied Physics

The localization and crystallographic dependence of Si suboxide species at the SiO2/Si interface

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Authors

PGP. J. GrunthanerMHM. H. HechtFGF. J. Grunthaner

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Grunthaner et al. (1987) studied this question.

synapsesocial.com/papers/6a32651bc93616f734584958https://doi.org/10.1063/1.338215
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