A High-Precision Fully Integrated Hall-Effect Angle Sensor with 0.087° Noise Floor in 0.35 μm CMOS Technology

Hall-effect sensors are pervasive in magnetic-field measurement applications, including current sensing and position detection, owing to their excellent compatibility with standard CMOS processes. However, the inherent offset and temperature drift of silicon-based Hall elements remain a paramount obstacle to achieve high precision. This paper presents a fully integrated angle sensor chip that addresses this challenge. Implemented in a 0.35 μm CMOS process, the sensor incorporates four cross-shaped Hall elements arranged in an orthogonal array as a non-contact Hall-permanent magnet configuration, which enables absolute angular encoding across a full 0–360° range. Experimental characterisation demonstrates a low noise floor of 0.087° (3σ), validating the effectiveness of the proposed architecture for high-accuracy angular measurement.