Formalism for quantitative surface analysis by electron spectroscopy

A new, simple formalism for quantitative surface analysis by electron spectroscopy is found. The formalism takes into account the in-depth concentration profile and consists in three algorithms. The simplest of the algorithms is reasonably accurate for spectra from most in-depth profiles. For narrow depth profiles centered at depths ≳1–2 λ and for spectra from a substrate with an overlayer of width ≳λ, one of the other two algorithms should be used. The formalism decides, by a simple criterion, which of the three algorithms is to be applied for a given spectrum. The total amount of material within the surface region of the solid as well as the approximate in-depth composition profile is determined by the formalism.