MIM Capacitors Based on ZrTiOₓ/ BaZry Ti1-y O₃ Featuring Record-Low VCC and Excellent Reliability

Perovskite-based BaZryTi 1-y O 3 (BZTO) (y=0.6) with partial crystallization has been found to possess a rather high- κ value of 48.6 and positive quadratic voltage coefficient of capacitance (VCC). Through stacking BZTO and ZrTiO x as laminate dielectric, metal-insulator-metal capacitors using VCC canceling effect advance frontiers by exhibiting a record-low VCC of 14 ppm/V 2 at the capacitance of 13.4 fF/μm 2 , low dielectric loss tangent , and low leakage current of 7.5×10 -9 A/cm 2 at -1 V. With constant voltage stress at 2.5 V for 1000 s, degradation in leakage current is observed. In addition, excellent reliability of 0.89% capacitance change against stress up to a projected of 10 years is also achieved. The aforementioned characteristics not only compare favorably to other high- κ-based dielectrics, most importantly, but also these results meet ITRS requirements set by 2024.