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July 15, 1976Applied Physics Letters

Capless annealing of ion-implanted GaAs

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Authors

AIA.A. ImmorlicaBAE Systems (United States)FEF. H. EisenGoethe University Frankfurt

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Immorlica et al. (1976) studied this question.

synapsesocial.com/papers/6a6f75b9a528af2d65c2ffc6https://doi.org/10.1063/1.88981
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Also Consider

Synapse has enriched 3 closely related papers on similar clinical questions. Consider them for comparative context:

  1. 1Influence of implantation temperature and surface protection on tellurium implantation in GaAs1972 · 89 citations
  2. 2Luminescence studies of a new line associated with germanium in GaAs1969 · 30 citations
  3. 3Photoluminescence of Cu-Doped Gallium Arsenide1966 · 138 citations