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October 15, 1970Applied Physics Letters

Outdiffusion Through Silicon Oxide and Silicon Nitride Layers on Gallium Arsenide

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Authors

JGJ. GyulaiInstitute for Technical Physics and Materials ScienceJMJ. W. MayerON Semiconductor (United States)IMI. V. MitchellUniversity of Hawaiʻi at Mānoa

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Gyulai et al. (1970) studied this question.

synapsesocial.com/papers/6a6f7631fe4101aa97dfca25https://doi.org/10.1063/1.1653422
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