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October 1, 1984Journal of The Electrochemical Society

Ion‐Beam Etching of InP and Its Application to the Fabrication of High Radiance InGaAsP / InP Light Emitting Diodes

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OWOsamu WadaKobe University

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Osamu Wada (1984) studied this question.

synapsesocial.com/papers/6a6fbc7ece524a4339c39a2dhttps://doi.org/10.1149/1.2115261
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