Good correlation has been found between disorder, measured by Rutherford back-scattering and the extinction coefficient obtained from ellipsometry measurements for 200 keV selenium ions implanted up to a dose of 1*10 15 cm -2 at room temperature. Both techniques show that InP becomes amorphous for doses greater than 5*10 18 Se + cm -2 . The magnitude of the reflectivity, refractive index and extinction coefficient, obtained from ellipsometry, are presented as a function of dose.
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Gill et al. (1981) studied this question.
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