Characteristics of Amorphous Lithium Lanthanum Titanate Electrolyte Thin Films Grown by PLD for Use in Rechargeable Lithium Microbatteries

(LLTO) film electrolytes for use in a lithium rechargeable microbattery were prepared on a Pt collector using pulsed laser deposition (PLD) at various deposition temperatures. As-grown 360 nm thick LLTO films prepared at 400-600°C showed an amorphous phase and an ionic conductivity of at room temperature. A lithium metal anode in contact with the amorphous LLTO films had no influence on the electronic conductivity of the LLTO solid-electrolyte, contrary to crystalline films. The retention capacity of the LLTO/100 nm thick cells during 100 cycles in a 1 M liquid electrolyte in propylene carbonate (PC) was and the cells exhibited an increase of compared with that for cells. The cells had excellent rechargeability characteristies of up to 300 cycles.