We report the observation of an efficient visible photoluminescence (PL) from Si microcrystals embedded in SiO 2 glass films. The Si microcrystals were formed by the rf magnetron sputtering technique. The peak position of the PL spectra at 77 K shifts to a lower-energy side as the average diameter of the Si microcrystals increases.
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Ôsaka et al. (1992) studied this question.
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