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March 22, 2005Journal of Applied Physics

High pressure regime of plasma enhanced deposition of microcrystalline silicon

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Authors

EAE. AmanatidesUniversity of PatrasAHA. HammadUniversity of Abou Bekr BelkaïdEKE. KatsiaUniversity of Patras

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Amanatides et al. (2005) studied this question.

synapsesocial.com/papers/6a7096225671bbf00bc2bb0chttps://doi.org/10.1063/1.1866477
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