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January 1, 1983Japanese Journal of Applied Physics

Detection of Neutral Species in Silane Plasma Using Coherent Anti-Stokes Raman Spectroscopy

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Authors

NHNobuhiro HataOita UniversityAMAkihisa MatsudaNippon Medical SchoolKTKazunobu TanakaThe University of Osaka

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Hata et al. (1983) studied this question.

synapsesocial.com/papers/6a70969af44fa9f079de416bhttps://doi.org/10.1143/jjap.22.l1
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