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February 1, 1979Journal of The Electrochemical Society

Glow Discharge Phenomena in Plasma Etching and Plasma Deposition

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Authors

JVJ. L. VossenLinde (United States)

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Cite This Study

J. L. Vossen (1979) studied this question.

synapsesocial.com/papers/6a72c44d75498292b70bb9b5https://doi.org/10.1149/1.2129029
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