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A thin-film semiconductor NOxsensor has been fabricated by reactive RF sputtering from a tin target. The gas detection is based on monitoring the sensor resistance change caused by NOxchemisorption on the sensor surface. The sensor is highly sensitive and selective toward detecting NOxin air. The chemical composition of the film was investigated by AES and ESCA. A simple chemisorption model is presented to explain the observed phenomena.
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Shih−Chia Chang (1979) studied this question.
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