Low noise sensors with low power consumption are needed for sensing the biomagnetic potentials produced by the human body. Compared to their electrical counterparts, biomagnetic sensors are noninvasive and noncontact. A strain-modulated FeCo-Hf/AlScN-based sensor with a bandwidth of 3.4 kHz and a magnetic noise spectral density at 1 kHz of 59.5 pT/Hz before demodulation and 98.5 pT/Hz after demodulation in an unshielded environment is presented. The footprint of the sensor including flux concentrators is 0.125 cm2, and the total power consumption of the printed circuit board (PCB)-based readout electronics is 440 mW. A theoretical analysis for the scaling of the sensitivity and the noise spectral density of modulated multiferroic sensor systems is presented.
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Huo et al. (2023) studied this question.
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