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January 1, 2005Journal of The Electrochemical Society

ALD of Hafnium Oxide Thin Films from Tetrakis(ethylmethylamino)hafnium and Ozone

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Authors

XLXinye LiuSoutheast UniversitySRSasangan RamanathanAmrita Vishwa VidyapeethamALAna Longdergan

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Liu et al. (2005) studied this question.

synapsesocial.com/papers/6a7d0458ec6dad7f5aaa05b3https://doi.org/10.1149/1.1859631
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