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February 1, 1999Journal of Applied Physics

Growth of ultrathin SiO2 on Si by surface irradiation with an O2+Ar electron cyclotron resonance microwave plasma at low temperatures

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YLYichun LiuSouth China Agricultural UniversityLHL. T. HoUniversity of MiamiYBYu Bai BaiJilin University

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Liu et al. (1999) studied this question.

synapsesocial.com/papers/6a7d652da88f8d6a78a01196https://doi.org/10.1063/1.369183
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