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November 1, 1984Journal of The Electrochemical SocietyOpen Access

Electrical Characteristics of the RF Magnetron‐Sputtered Tantalum Pentoxide‐Silicon Interface

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Authors

SSShunji SekiUniversity of Illinois Urbana-ChampaignTUTakashi UnagamiTeikyo UniversityBTBunjiro TsujiyamaNTT (Japan)

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Seki et al. (1984) studied this question.

synapsesocial.com/papers/6a7d65cdf1daba58ecd5b8d0https://doi.org/10.1149/1.2115371
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