An understanding of fracture kinetics during the layer transfer of InP

The layer transfer of InP with the Smart Cut™ technology shows an original behavior, with the existence of a transition temperature, above which fracture occurs rapidly and below which it never spontaneously happens. Using microcracks observation and measurement of the amount of H 2 inside cracks, we show that the existence of the two regimes is due to a competition between a trapping of implanted hydrogen inside the cracks and its out-diffusion into the bonded structure.