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July 1, 1984Journal of Vacuum Science & Technology A Vacuum Surfaces and FilmsOpen Access

The thermalization of energetic atoms during the sputtering process

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RSR.E. SomekhQueen's University Belfast

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R.E. Somekh (1984) studied this question.

synapsesocial.com/papers/6a82a69e5b7acbbacb8d62c0https://doi.org/10.1116/1.572396
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