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April 1, 1999IEEE Journal of Solid-State Circuits

A three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics

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MLM. LemkinBBBernhard E. Boser

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Lemkin et al. (1999) studied this question.

synapsesocial.com/papers/6a82e602aab30c8fb7b28a3bhttps://doi.org/10.1109/4.753678
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Also Consider

Synapse has enriched 2 closely related papers on similar clinical questions. Consider them for comparative context:

  1. 1Surface micromachined accelerometers1996 · 288 citations
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