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May 19, 2014Plasma Sources Science and Technology

Electron heating in capacitively coupled plasmas revisited

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TLTrevor LafleurUNSW SydneyPCPascal ChabertUniversité Paris-SudJBJean‐Paul BoothCentre National de la Recherche Scientifique

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Lafleur et al. (2014) studied this question.

synapsesocial.com/papers/6a82fb6d67735c513e7d57dahttps://doi.org/10.1088/0963-0252/23/3/035010
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