Synapse
⌘+K
Synapse
PulseExploreClubsResearchersJournals
Instagram
HomeClubsExplore
July 1, 1992Journal of Vacuum Science & Technology A Vacuum Surfaces and FilmsOpen Access

Frequency effects in silane plasmas for plasma enhanced chemical vapor deposition

View Full Paper
Ask AI
Bookmark
Share

Authors

AHA.A. HowlingÉcole Polytechnique Fédérale de LausanneJDJ.-L. DorierÉcole Polytechnique Fédérale de LausanneCHCh. HollensteinÉcole Polytechnique Fédérale de Lausanne

Discussion

Loading...

Member takes

Implication

Key Points

Key points are not available for this paper at this time.

Cite This Study

Howling et al. (1992) studied this question.

synapsesocial.com/papers/6a8304bac0477142e551a7e7https://doi.org/10.1116/1.578205
View Full Paper
Ask AI
Bookmark
Share