The anomalous electron backscattering in sub-keV energy region requires a special treatment of elastic and inelastic electron scattering. Partial wave cross-sections are approached by a fit formula; core ionization and secondary electron creation as well as dielectric energy losses with corresponding momentum changes are taken into consideration. The set-up Monte Carlo programme TRACER provides angular and energy distribution as well as total fraction of backscattered electrons for elements and compounds in a large energy range.
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Fitting et al. (1991) studied this question.
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