Monte Carlo simulation of ion beam penetration in solids

The essential features of a Monte Carlo program which simulates the scattering and the retardation of energetic ions in amorphous targets are presented. The new experimentally derived universal scattering cross-section of Kalbitzer and Oetzmann is used to describe nuclear scattering events. For electronic energy loss, the Lindhard-Scharff and Bethe formulae are used. The program was primarily developed to study the spatial distribution of ion deposited energy for lithographic applications. However, for initial verification, the program has been used to study the fundamental characteristics of ion transport for various ion-target combinations. The theoretical predictions obtained using the above expressions for nuclear scattering and electronic energy loss are shown to agree very well with experimental results.