Synapse
⌘+K
Synapse
PulseExploreClubsResearchersJournals
Instagram
HomeClubsExplore
September 1, 1988Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena

A new formation process of anodizable structures of n, n+, and n− silicon for the production of silicon-on-insulator structures

View Full Paper
Ask AI
Bookmark
Share

Authors

XTXiang‐Zheng TuCentral South University

Discussion

Loading...

Member takes

Implication

Key Points

Key points are not available for this paper at this time.

Cite This Study

Xiang‐Zheng Tu (1988) studied this question.

synapsesocial.com/papers/6a833ab48847014bd6990936https://doi.org/10.1116/1.584208
View Full Paper
Ask AI
Bookmark
Share