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August 15, 1989Journal of Applied Physics

Enhancement of the negative ion flux to surfaces from radio-frequency processing discharges

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Authors

LOLawrence OverzetThe University of Texas at DallasJBJ. H. BebermanUniversity of Illinois Urbana-ChampaignJVJ. T. VerdeyenCU Aerospace (United States)

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Overzet et al. (1989) studied this question.

synapsesocial.com/papers/6a8351e3b95cf4e61630e3d8https://doi.org/10.1063/1.344376
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