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October 14, 1988Journal of Physics D Applied Physics

Ion and electron energy analysis at a surface in an RF discharge

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SIS. G. IngramThe University of Texas MD Anderson Cancer CenterNBNicholas BraithwaiteThe Open University

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Ingram et al. (1988) studied this question.

synapsesocial.com/papers/6a8351e3b95cf4e61630e3d9https://doi.org/10.1088/0022-3727/21/10/005
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