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November 1, 1986Journal of The Electrochemical SocietyOpen Access

Theoretical and Empirical Studies of Impurity Incorporation into β ‐ SiC Thin Films during Epitaxial Growth

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Authors

HKH. J. KimNorth Carolina State UniversityRDR. F. DavisCarnegie Mellon University

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Kim et al. (1986) studied this question.

synapsesocial.com/papers/6a84f8e9e7eca461fe8476ebhttps://doi.org/10.1149/1.2108406
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