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February 15, 1976Applied Physics Letters

Anomalous migration of ion-implanted Al in Si

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Authors

HDH.B. DietrichUnited States Naval Research LaboratoryWWW. WeisenbergerActive Implants (United States)JCJ. ComasNational Institute of Standards and Technology

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Dietrich et al. (1976) studied this question.

synapsesocial.com/papers/6a853cc14b2893ddcbc6b43chttps://doi.org/10.1063/1.88716
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  5. 5DOPING OF SILICON BY ION IMPLANTATION1968 · 34 citations