16 × 4 Linear Solar-Blind UV Photoconductive Detector Array Based on β-Ga₂O₃ Film

In this article, a 16×4 linear array of β-Ga2O3-based metal-semiconductor-metal structured photodetector is described for solar-blind sensing operation at a wavelength of 254 nm. The β-Ga2O3film is grown by using metal-organic chemical vapor deposition (MOCVD) equipment, and the photodetectors are finished in constructing with standard photolithography and ion beam sputtering procedures. The results show that the dark current ( Idark), photo-to-dark current ratio (PDCR), photo responsivity (R), specific detectivity (D*), exterl quantum efficiency (EQE), and linear dynamic region (LDR) are 1.94 pA, 2.95 ×107, 139.56 A/W, 2.55 ×1015Jones, 6.8 ×104 %, and 149.4 dB, at 10 V bias and 2000 μW / cm2light intensity illumination. In addition, the standard deviation of R for this photodetector array is 10%. Overall, such a 16 ×4 linear array of β-Ga2O3-based photodetector array makes a progress in the field of Ga2O3photodetectors.