Numerical Study of the Effects of Frequency in Inductively Coupled Plasma Using Particle-in-Cell/Monte Carlo Simulation

The effects of induction frequency on inductively coupled plasma (ICP) have been investigated in a collision-dominated region in Ar under a constant dissipated power using the particle-in-cell/Monte Carlo (PIC/MC) simulation. The plasma density, potential, electron energy distribution and mean electron energy are discussed as a function of the applied frequencies of 6.78 MHz, 13.56 MHz, 27.12 MHz and 100 MHz at pressure of 100 mTorr and 300 mTorr.