Two-Dimensional Modeling of Spatiotemporal Structure of Inductively Coupled Plasma

An inductively coupled plasma (ICP) is one of the candidates for a high density, large area and uniform plasma source for use in plasma processing even under low pressure conditions. We have developed a two-dimensional and time dependent model for a collision dominated ICP, taking into consideration electron transport in both the electric and magnetic fields, based on the relaxation continuum (RCT) model in a self-consistent manner. The 2D-space and time structure of an ICP, driven by a frequency of 13.56 MHz and a current amplitude of 10 A at 0.3 Torr in Ar is mainly discussed. In particular, a space potential with a double frequency time variation, at a plasma density of 1011 cm-3 is clarified as well as a potential distribution of the insulating wall of ICP. The importance of the power deposition by E r ×B z drift of electrons in front of the side wall, in addition to E θ drift is pointed out in terms of the plasma maintenance.