Synapse
⌘+K
Synapse
PulseExploreClubsResearchersJournals
Instagram
HomeClubsExplore
March 15, 1988Journal of Applied Physics

Ion energy measurement at the powered electrode in an rf discharge

View Full Paper
Ask AI
Bookmark
Share

Authors

AKA. D. KuypersNetherlands Organisation for Applied Scientific ResearchHHH. J. HopmanAmsterdam UMC Location Vrije Universiteit Amsterdam

Discussion

Loading...

Member takes

Implication

Key Points

Key points are not available for this paper at this time.

Cite This Study

Kuypers et al. (1988) studied this question.

synapsesocial.com/papers/6a86a15c2f262b2b476ed19ehttps://doi.org/10.1063/1.339888
View Full Paper
Ask AI
Bookmark
Share

Also Consider

Synapse has enriched 5 closely related papers on similar clinical questions. Consider them for comparative context:

  1. 1A magnetic multipole reactor for high-flux reactive-ion etching1988 · 17 citations
  2. 2Ion bombardment energy distributions in radio-frequency glow-discharge systems1986 · 108 citations
  3. 3Time-resolved optical diagnostics of radio frequency plasmas1985 · 73 citations
  4. 4Positive-ion bombardment of substrates in rf diode glow discharge sputtering1972 · 421 citations
  5. 5Energy Dispersion of Positive Ions Effused from an <i>R</i><i>F</i> Plasma1970 · 54 citations