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May 1, 1985Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena

Topography-induced thickness variation anomalies for spin-coated thin films

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Authors

LWL. K. WhiteSRI InternationalNMN. Miszkowski

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White et al. (1985) studied this question.

synapsesocial.com/papers/6a86bb2fcbde9db34bcb8b4ehttps://doi.org/10.1116/1.583117
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