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June 1, 1981Journal of The Electrochemical Society

Oxidation, Impurity Diffusion, and Defect Growth in Silicon—An Overview

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RFRichard B. FairUniversity of North Carolina at Charlotte

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Richard B. Fair (1981) studied this question.

synapsesocial.com/papers/6a86c3d02174986a53ca0409https://doi.org/10.1149/1.2127636
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