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February 1, 1990Journal of Applied Physics

Measurement of ion energy distributions at the powered rf electrode in a variable magnetic field

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Authors

AKA. D. KuypersNetherlands Organisation for Applied Scientific ResearchHHH. J. HopmanAmsterdam UMC Location Vrije Universiteit Amsterdam

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Kuypers et al. (1990) studied this question.

synapsesocial.com/papers/6a86cae4cbc6304817beef07https://doi.org/10.1063/1.345721
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