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May 1, 1985Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

The effects of hydrogenation on the properties of ion beam sputter deposited amorphous carbon

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Authors

FJFrank JansenInstitute for Applied Systems Technology BremenMMM. A. MachonkinPalo Alto Research CenterSKS. KaplanPhilips (Finland)

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Jansen et al. (1985) studied this question.

synapsesocial.com/papers/6a871eb25ee22a1e35cbae3fhttps://doi.org/10.1116/1.572960
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