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October 24, 1988Applied Physics Letters

Measurements of F*, CF, and CF2 formation and decay in pulsed fluorocarbon discharges

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Authors

SHSteven G. HansenLawrence Berkeley National LaboratoryGLG. LuckmanAxcelis Technologies (United States)SCSteven D. ColsonRutgers, The State University of New Jersey

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Hansen et al. (1988) studied this question.

synapsesocial.com/papers/6a87ff4da082a64c2914b59bhttps://doi.org/10.1063/1.100436
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