Synapse
⌘+K
Synapse
PulseExploreClubsResearchersJournals
Instagram
HomeClubsExplore
November 1, 1989Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena

Sub-20-nm-wide line fabrication in poly(methylmethacrylate) using a Ga+ microprobe

View Full Paper
Ask AI
Bookmark
Share

Authors

RKR. L. KubenaHRL Laboratories (United States)FSF. P. StrattonHRL Laboratories (United States)JWJ. W. WardSurrey Satellite Technology (United Kingdom)

Discussion

Loading...

Member takes

Overview

Key Points

Key points are not available for this paper at this time.

Cite This Study

Kubena et al. (1989) studied this question.

synapsesocial.com/papers/6a88215f054eefc4d776f51dhttps://doi.org/10.1116/1.584460
View Full Paper
Ask AI
Bookmark
Share