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July 1, 1987Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena

Ion species dependence of focused-ion-beam lithography

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SMShinji MatsuiUniversity of HyogoKMKatsumi MoriThe University of TokyoTSTakao ShiokawaRIKEN

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Cite This Study

Matsui et al. (1987) studied this question.

synapsesocial.com/papers/6a88215f054eefc4d776f520https://doi.org/10.1116/1.583679
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