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January 1, 1995IEEE Journal of Solid-State Circuits

A monolithic surface micromachined accelerometer with digital output

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Authors

CLChin-Chin LuSilicon Labs (United States)MLM. LemkinIncyte (United States)BBBernhard E. BoserUniversity of California, Berkeley

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Cite This Study

Lu et al. (1995) studied this question.

synapsesocial.com/papers/6a892bb346f665d098761100https://doi.org/10.1109/4.482163
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