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June 16, 2004Journal of Applied Physics

Synthesis of sheath voltage drops in asymmetric radio-frequency discharges

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Authors

SYShigeru YonemuraNippon Steel (Japan)KNKenichi NanbuTohoku UniversityNINaoaki Iwata

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Yonemura et al. (2004) studied this question.

synapsesocial.com/papers/6a892f8ba80e40e0ce4d32f9https://doi.org/10.1063/1.1759787
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