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June 1, 1989Journal of Applied Physics

Spherical shell model of an asymmetric rf discharge

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MLM. A. LiebermanUniversity of California, Berkeley

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M. A. Lieberman (1989) studied this question.

synapsesocial.com/papers/6a8932cea90c2f4c44fb8ab9https://doi.org/10.1063/1.343298
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