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January 1, 1988Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Gas density reduction effects in magnetrons

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SRS. M. RossnagelUniversity of Virginia

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S. M. Rossnagel (1988) studied this question.

synapsesocial.com/papers/6a8931eb3d6e0fcd7a28c8e1 https://doi.org/10.1116/1.574988

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